%0 Journal Article %T Wafer‐Scale Strain Engineering of Ultrathin Semiconductor Crystalline Layers %A Leite, Marina S. %A Warmann, Emily C. %A Kimball, Gregory M. %A Burgos, Stanley P. %A Callahan, Dennis M. %A Atwater, Harry A. %J Advanced Materials %V 23 %N 33 %P 3801-3807 %@ 0935-9648 %D 2011-09-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve