%0 Journal Article
%T Magnetron Deposition of Oxide Films in the Metallic Mode Enhanced by Radio-Frequency Inductively Coupled Plasma Source
%A Sidelev, D. V.
%A Voronina, E. D.
%J Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
%V 17
%N 5
%P 1143-1147
%@ 1027-4510
%D 2023-10-01
%I Pleiades Publishing
%~ DeepDyve