%0 Journal Article %T Electrostatic-pneumatic membrane mirror with positive or negative variable optical power %A Moghimi, Mohammad J. %A Wilson, Chris %A Dickensheets, David L. %J Proceedings of SPIE %V 8617 %P 861707-861707-9 %@ 0277-786X %D 2013-03-04 %I SPIE %~ DeepDyve