%0 Journal Article %T Nickel silicon thin film as barrier in under-bump-metallization by magnetronsputtering deposition for Pb-free chip packaging %A Li, Y. %A Chen, J. %A Lazik, C. %A Wang, P. %A Yang, L. %A Yu, J. %A Sun, T. %A Ko, E. %J Journal of Materials Research %V 20 %N 10 %P 2622-2626 %@ 0884-2914 %D 2005-10-01 %I Springer International Publishing %~ DeepDyve