%0 Journal Article
%T Bilayer lift-off process for aluminum metallization
%A Wilson, Thomas E.
%A Korolev, Konstantin A.
%A Crow, Nathaniel A.
%A ,
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 14
%N 1
%P 014501-014501
%@ 1932-5150
%D 2015-01-01
%I SPIE
%~ DeepDyve