%0 Journal Article
%T Properties of a Permeation Barrier Material Deposited from Hexamethyl Disiloxane and Oxygen
%A Han, Lin
%A Mandlik, Prashant
%A Gartside, Jonathan
%A Wagner, Sigurd
%A Silvernail, Jeff A.
%A Ma, Rui-Qing
%A Hack, Michael
%A Brown, Julie J.
%J Journal of the Electrochemical Society
%V 156
%N 2
%P H106-H114
%@ 0013-4651
%D 2008-12-01
%~ DeepDyve