%0 Journal Article
%T Plasma deposition of silicon nitride films in a radial‐flow reactor
%A Yoo, Chue‐San
%A Dixon, Anthony G.
%J Aiche Journal
%V 35
%N 6
%P 995-1002
%@ 0001-1541
%D 1989-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve