%0 Journal Article
%T Principal Physics of Oblique Sputtering of Calcium Phosphate Coatings Using RF-Magnetron Discharge Plasma
%A Prosolov, K. A.
%A Belyavskaya, O. A.
%A Lastovka, V. V.
%A Chaikina, M. V.
%A Sharkeev, Yu. P.
%J Russian Physics Journal
%V 63
%N 11
%P 1891-1897
%@ 1064-8887
%D 2021-03-17
%I Springer US
%~ DeepDyve