%0 Journal Article
%T Adhesion Strength of Amorphous Carbon Films Deposited on a Trench Sidewall
%A Toyoshima, Kyohei
%A Farghali, Abdelrahman
%A Choi, Junho
%J Coatings
%V 12
%N 8
%@ 2079-6412
%D 2022-08-20
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve