%0 Journal Article
%T Integrating MEMS and ICs
%A Fischer, Andreas C.
%A Forsberg, Fredrik
%A Lapisa, Martin
%A Bleiker, Simon J.
%A Stemme, Göran
%A Roxhed, Niclas
%A Niklaus, Frank
%J Microsystems & Nanoengineering
%V 1
%N 1
%P 1-16
%D 2015-05-28
%I Nature Publishing Group UK
%~ DeepDyve