%0 Journal Article %T Wavelength-dependent near-infrared microbolometer for short-wavelength infrared light with gold nanowire grating optical absorber %A Tsubota, Tatsuya %A Uesugi, Akio %A Sugano, Koji %A Isono, Yoshitada %J Microsystem Technologies %V 27 %N 3 %P 997-1005 %@ 0946-7076 %D 2020-08-25 %I Springer Berlin Heidelberg %~ DeepDyve