%0 Journal Article
%T Simulation of epitaxial growth under ion-beam sputtering
%A Trushin, O. S.
%A Bochkarev, V. F.
%A Naumov, V. V.
%J Russian Microelectronics
%V 29
%N 4
%P 261-272
%@ 1063-7397
%D 2000-07-01
%I Nauka/Interperiodica
%~ DeepDyve