%0 Journal Article
%T 59.4: A Novel Route for Thinning of LCD Glass Substrates
%A Byun, Ji Young
%A Lee, Ki Won
%J Sid Symposium Digest of Technical Papers
%V 37
%N 1
%@ 0097-966X
%D 2006-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve