%0 Journal Article
%T Preparation and properties of different dielectric films with Al metal electrode
%A Dong, Qi
%A Zhong, Shao‐Long
%A Feng, Qi‐Kun
%A Zheng, Ming‐Sheng
%A Ping, Jiang‐Bo
%A Dang, Zhi‐Min
%J IET Nanodielectrics
%V 5
%N 3-4
%P 125-131
%D 2022-09-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve