%0 Journal Article %T A Comparative Study of Spin‐On and Chemical Vapor Deposited Teflon Amorphous Fluoropolymer Thin Films %A Sharangpani, R. %A Singh, R. %J Journal of the Electrochemical Society %V 144 %N 8 %P 2924-2928 %@ 0013-4651 %D 1997-08-01 %~ DeepDyve