%0 Journal Article %T Evaluation of structural reliability of mems device in digital video disk systems %A Park, Byungwoo %A Bu, Jong Uk %A Kwon, Dongii %J Metals and Materials %V 4 %N 4 %P 827-831 %@ 1598-9623 %D 1998-08-01 %I The Korean Institute of Metals and Materials %~ DeepDyve