%0 Journal Article
%T High sensitivity X-ray analysis for a low accelerating voltage scanning electron microscope using a transition edge sensor
%A Tanaka,, Keiichi
%A Takano,, Akira
%A Nagata,, Atsushi
%A Nakayama,, Satoshi
%A Takahashi,, Kaname
%A Ajima,, Masahiko
%A Obara,, Kenji
%A Chinone,, Kazuo
%J Microscopy
%V 69
%N 5
%P 298-303
%@ 0022-0744
%D 2020-10-30
%I The Japanese Society of Microscopy
%~ DeepDyve