%0 Journal Article
%T Communication—A Powerful Method to Improve Dielectric/GaN Interface Properties: A Dummy SiO2 Process
%A Irokawa, Yoshihiro
%A Nabatame, Toshihide
%A Sawada, Tomomi
%A Miyamoto, Manami
%A Miura, Hiromi
%A Tsukagoshi, Kazuhito
%A Koide, Yasuo
%J ECS Journal of Solid State Science and Technology
%V 13
%N 8
%P 4
%@ 2162-8769
%D 2024-08-01
%I IOP Publishing
%~ DeepDyve