%0 Journal Article
%T Industrial applications for LIGA-fabricated micro heat exchangers
%A Kelly, Kevin W.
%A Stephens, Lyndon S.
%A Marques, Christophe
%A Foley, Dan
%J Proceedings of SPIE
%V 4559
%N 1
%P 73-84
%@ 0277-786X
%D 2001-10-01
%I SPIE
%~ DeepDyve