%0 Journal Article
%T Application of the Harrington function in substantiating the choice of the best equipment for plasma processing of materials
%A Tazmeev, B K
%A Tsybulevsky, V V
%A Tazmeeva, R N
%A Tazmeev, G K
%J Journal of Physics: Conference Series
%V 2270
%N 1
%P 6
%@ 1742-6588
%D 2022-05-01
%I IOP Publishing
%~ DeepDyve