%0 Journal Article
%T Design of an electron projection system with slider lenses and multiple beams
%A Moonen, Daniel
%A Leunissen, Peter L. H. A.
%A de Jager, Patrick W.
%A Kruit, Pieter
%A Bleeker, Arno J.
%J Proceedings of SPIE
%V 4688
%N 1
%P 932-943
%@ 0277-786X
%D 2002-07-05
%I SPIE
%~ DeepDyve