%0 Journal Article
%T Optimization of NIL and associated pattern transfer processes for the fabrication of advanced devices
%A Ogusu, Makoto
%A Tamura, Masahiro
%A Nomura, Yu
%A Saito, Tomohiro
%A Kunugi, Hideki
%A Yamaji, Tomohito
%A Tanaka, Fumiaki
%A Abe, Takahiro
%J Proceedings of SPIE
%V 12956
%P 1295604-1295604-12
%@ 0277-786X
%D 2024-04-09
%I SPIE
%~ DeepDyve