%0 Journal Article
%T Supercomputer modeling of the ion beam sputtering process: full-atomistic level
%A Grigoriev, F. V.
%A Sulimov, A. V.
%A Kochikov, I. V.
%A Kondakova, O. A.
%A Sulimov, V. B.
%A Tikhonravov, A. V.
%J Proceedings of SPIE
%V 9627
%P 962708-962708-9
%@ 0277-786X
%D 2015-09-23
%I SPIE
%~ DeepDyve