%0 Journal Article
%T Monitoring the dissolution rate of photoresist thin films via multiwavelength interferometry
%A Agrawal, Ankur
%J Proceedings of SPIE
%V 5038
%N 1
%P 1026-1037
%@ 0277-786X
%D 2003-05-27
%I SPIE
%~ DeepDyve