%0 Journal Article
%T 2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process
%A Jain, Ankush
%A Gopal, Ram
%J Microsystem Technologies
%V 20
%N 7
%P 1291-1297
%@ 0946-7076
%D 2013-11-29
%I Springer Berlin Heidelberg
%~ DeepDyve