%0 Journal Article
%T Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets
%A Higashiguchi, Takeshi
%A Sasaki, Wataru
%A Kubodera, Shoichi
%J Proceedings of SPIE
%V 5196
%N 1
%P 86-96
%@ 0277-786X
%D 2004-01-07
%I SPIE
%~ DeepDyve