%0 Journal Article
%T Influence of increasing temperature deformation on the removal uniformity of chemical mechanical polishing plate and improvement method
%A Ye, Guoqing
%A Yao, Zhenqiang
%J Journal of Physics: Conference Series
%V 2992
%N 1
%P 10
%@ 1742-6588
%D 2025-04-01
%I IOP Publishing
%~ DeepDyve