%0 Journal Article
%T Experimental considerations for integration method of Si thin-film microchips for fluidic self-assembly
%A Fujita, Yutaka
%A Tanabe, Katsuaki
%J Japanese Journal of Applied Physics
%V 62
%N 8
%P 9
%@ 0021-4922
%D 2023-08-01
%I IOP Publishing
%~ DeepDyve