%0 Journal Article
%T An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer
%A Teo, Adrian J T
%A Li, Holden
%A Tan, Say Hwa
%A Yoon, Yong-Jin
%J Journal of Micromechanics and Microengineering
%V 27
%N 6
%P 8
%@ 0960-1317
%D 2017-06-01
%~ DeepDyve