%0 Journal Article
%T Dynamic measurements of actuators driven by AlN layers
%A Kacperski, Jacek 
%A Leon, Sergio Camacho
%A Nieradko, Lukasz
%J Proceedings of SPIE
%V 5958
%N 1
%P 59580J-59580J-8
%@ 0277-786X
%D 2005-09-16
%I SPIE
%~ DeepDyve