%0 Journal Article
%T Electrochemical Etching of Tungsten for Fabrication of Sub-10-nm Tips with a Long Taper and a Large Shank
%A Qin, Shanli
%A Deng, Hui
%J Nanomanufacturing and Metrology
%V 2
%N 4
%P 235-240
%@ 2520-811X
%D 2019-09-24
%I Springer Singapore
%~ DeepDyve