%0 Journal Article
%T Development of refined cleaning technique focusing on an ecological viewpoint
%A Tange, Koji
%A Oomasa, Yuki
%A Usui, Hozumi
%J Proceedings of SPIE
%V 4409
%N 1
%P 418-429
%@ 0277-786X
%D 2001-09-05
%I SPIE
%~ DeepDyve