%0 Journal Article
%T A large-area ultra-precision 2D geometrical measurement technique based on statistical random phase detection
%A Ekberg, Peter
%A Stiblert, Lars
%A Mattsson, Lars
%J Measurement Science and Technology
%V 23
%N 3
%P 9
%@ 0957-0233
%D 2012-03-01
%~ DeepDyve