%0 Journal Article
%T Monte-Carlo-Based Automatic Design of Chromeless Phase Shift Mask
%A Lee, Jai-Cheol
%A Oh, Yong-Ho
%A Lim, Sungwoo
%A Go, Chun Soo
%A Roh, Sung Su
%J Japanese Journal of Applied Physics
%V 43
%N 2R
%@ 0021-4922
%D 2004-02-01
%~ DeepDyve