%0 Journal Article
%T Monolithic radio frequency SiN x self-rolled-up nanomembrane interdigital capacitor modeling and fabrication
%A Sang, Lei
%A Zhou, Hao
%A Yang, Zhendong
%A Kraman, Mark D
%A Zhao, Haojie
%A Michaels, Julian A
%A Sievers, Dane J
%A Schutt-aine, Jose E
%A Li, Xiuling
%A Huang, Wen
%J Nanotechnology
%V 30
%N 36
%P 7
%@ 0957-4484
%D 2019-06-17
%~ DeepDyve