%0 Journal Article
%T Interferometric measurement of thickness variation of double-sided polished wafer
%A Bian, Xiaoyue
%A Han, Sen
%A Cheng, Jun
%A Zhang, Linghua
%A Wang, Quanzhao
%A Li, Xueyuan
%A Wu, Quanying
%J Proceedings of SPIE
%V 12319
%P 123191B-123191B-7
%@ 0277-786X
%D 2022-12-19
%I SPIE
%~ DeepDyve