%0 Journal Article
%T Magnification correction for proximity x-ray lithography
%A Chen, Alek C.
%A Silverman, J. P.
%J Proceedings of SPIE
%V 2437
%N 1
%P 140-150
%@ 0277-786X
%D 1995-05-19
%I SPIE
%~ DeepDyve