%0 Journal Article
%T Spatial phase-shifting lateral shearing interferometer
%A Guo, Xiaoxian
%A Zeng, Aijun
%A Huang, Huijie
%J Proceedings of SPIE
%V 7160
%N 1
%P 71602D-71602D-8
%@ 0277-786X
%D 2008-12-03
%I SPIE
%~ DeepDyve