%0 Journal Article
%T Base‐amplifying silicone resins with photobase‐generating side chains and their application to negative‐working photoresists
%A Furutani, Masahiro
%A Kobayashi, Hiroshi
%A Gunji, Takahiro
%A Abe, Yoshimoto
%A Arimitsu, Koji
%J Journal of Polymer Science Part A Polymer Chemistry
%V 53
%N 10
%P 1205-1212
%@ 0887-624X
%D 2016-03-15
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve