%0 Journal Article
%T Accuracy of overlay measurements: tool and mark asymmetry effects
%A Starikov, Alexander
%A Coleman, Daniel J.
%A Larson, Patricia J.
%A Lopata, Alexander D.
%A Muth, William A.
%J Optical Engineering
%V 31
%N 6
%P 1298-1310
%@ 0091-3286
%D 1992-06-01
%I SPIE
%~ DeepDyve