%0 Journal Article %T Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators %A Schneider, Michael %A DeMiguel-Ramos, Mario %A Flewitt, Andrew J. %A Iborra, Enrique %A Schmid, Ulrich %J Proceedings %V 1 %N 4 %@ 2504-3900 %D 2017-08-18 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve