%0 Journal Article
%T Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip
%A Deng, T
%A Sun, Z
%A Li, G
%A Chen, J
%A Chen, D
%A Wang, J
%J Journal of Micromechanics and Microengineering
%V 27
%N 2
%P 7
%@ 0960-1317
%D 2017-02-01
%~ DeepDyve