%0 Journal Article
%T Nanoimprint system development and status for high volume semiconductor manufacturing
%A Takeishi, Hiroaki
%A Sreenivasan, S.V.
%J Proceedings of SPIE
%V 9423
%P 94230C-94230C-9
%@ 0277-786X
%D 2015-03-19
%I SPIE
%~ DeepDyve