%0 Journal Article
%T A replacement of high-k process for CMOS transistor by atomic layer deposition
%A Han, Jin-Woo
%A Choi, Byung Joon
%A Yang, J Joshua
%A Moon, Dong-Il
%A Choi, Yang-Kyu
%A Williams, R Stanley
%A Meyyappan, M
%J Semiconductor Science and Technology
%V 28
%N 8
%P 4
%@ 0268-1242
%D 2013-08-01
%~ DeepDyve