%0 Journal Article
%T Aerosol jet printed PZT actuated MEMS resonating cantilever scanner
%A Li, Ming-Yao
%A Peng, Kuan-Cheng
%A Hsu, Yi-Feng
%A Chen, Peng-Jyun
%A Tsui, Chi-Leung
%A Wu, Wen-Jong
%A Wang, Wei-Chih
%J Proceedings of SPIE
%V 11283
%P 1128329-1128329-10
%@ 0277-786X
%D 2020-02-25
%I SPIE
%~ DeepDyve