%0 Journal Article
%T Atomic layer processing of MoS2
%A Hues, John D.
%A Tenorio, Jacob A.
%A Leong, Icelene
%A Hues, Steven M.
%A Graugnard, Elton
%J Proceedings of SPIE
%V 13114
%P 131140A-131140A-6
%@ 0277-786X
%D 2024-10-02
%I SPIE
%~ DeepDyve