%0 Journal Article
%T Compressed sensing for optical metrology of semiconductor materials and devices
%A Koutsourakis, George
%A Thompson, Andrew
%A Blakesley, James C.
%A Baltusis, Aidas
%A Wood, Sebastian
%J Proceedings of SPIE
%V 12619
%P 1261903-1261903-9
%@ 0277-786X
%D 2023-08-10
%I SPIE
%~ DeepDyve