%0 Journal Article
%T High-resolution stress measurements for microsystem and semiconductor applications
%A Vogel, Dietmar
%A Keller, Juergen
%A Michel, Bernd
%J Proceedings of SPIE
%V 6188
%N 1
%P 61880P-61880P-8
%@ 0277-786X
%D 2006-04-21
%I SPIE
%~ DeepDyve