%0 Journal Article
%T Effect of mask 3D and scanner focus difference on OPC modeling and verification
%A Ning, GuoXiang
%A Cheng, Jacky
%A Kropinov, Sergey
%A Litt, Lloyd C.
%A Zhang, Dongqing
%A Ackmann, Paul
%A Foong, Yee Mei
%J Proceedings of SPIE
%V 9052
%P 905221-905221-8
%@ 0277-786X
%D 2014-03-31
%I SPIE
%~ DeepDyve