%0 Journal Article
%T Development of a novel plasma probe for the investigation and control of plasma‐enhanced chemical vapor deposition coating processes
%A Kasashima, Yuji
%A Brenner, Thorben
%A Vissing, Klaus
%J Plasma Processes and Polymers
%V 17
%N 11
%P n/a-n/a
%@ 1612-8850
%D 2020-11-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve